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Yuan Weizheng

Professor

Calculated based on number of publications stored in Pure and citations from Scopus
1989 …2025

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  • 2011

    An integrated reduced micromachined inertial measurement unit for land vehicle navigation

    Chang, H., Fu, Q., Shen, Q., Xie, J. & Yuan, W., 2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 201-204 4 p. 6017329. (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Design and fabrication of a Piezoelectric Micro Synthetic Jet Actuator

    Deng, J., Yuan, W., Luo, J., Shen, D. & Ma, B., 2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 301-304 4 p. 6017353. (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    8 Scopus citations

  • Effect of wet etching parameter on the diameter and length of silicon nanowires

    He, Y., Jiang, C., Yin, H., Jun, C. & Yuan, W., 2011, MEMS/NEMS Nano Technology. Trans Tech Publications Ltd, p. 584-588 5 p. (Key Engineering Materials; vol. 483).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Improve blood clotting feature of silicon microneedle by silver coating

    He, Y., Jiang, C., Liu, Z., Ren, S., Chen, J., Yin, H. & Yuan, W., 2011, MEMS/NEMS Nano Technology. Trans Tech Publications Ltd, p. 255-258 4 p. (Key Engineering Materials; vol. 483).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Rapidly identify the critical parameter of mems device based on element model library

    He, Y., Jiang, C., Yuan, W., Yung, K. L. & Xu, Y., 2011, MEMS/NEMS Nano Technology. Trans Tech Publications Ltd, p. 684-689 6 p. (Key Engineering Materials; vol. 483).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • 2010

    Design and simulation of micro spectrometer based on torsional MEMS grating

    Yan, B., Yuan, W., Sun, R., Qiao, D., Yu, Y. & Li, T., 2010, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems. 76570V. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7657).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    2 Scopus citations

  • Flexible thermal sensor array on PI film substrate for underwater applications

    Ma, B., Ren, J., Deng, J. & Yuan, W., 2010, MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. p. 679-682 4 p. 5442315. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    33 Scopus citations

  • Fully flexible hot film sensor array for underwater applications

    Ren, J., Ma, B., Deng, J. & Yuan, W., 2010, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. p. 173-176 4 p. 5592181. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    4 Scopus citations

  • Rapid synthesis of MEMS devices based on element model library and metamodel

    He, Y., Jiang, C., Yung, K. L., Xu, Y. & Yuan, W., 2010, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. p. 301-305 5 p. 5592221. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • System-level modeling and verification of a micro pitch-tunable grating

    Lv, X., Xu, J., Yu, Y., He, Y. & Yuan, W., 2010, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems. 76571M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7657).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • 2009

    Angularly parameterized macromodel extraction for microstructures with a large number of terminals

    Xu, J., Yuan, W., Chang, H. & Ma, B., 2009, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 37-40 4 p. 5068522. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • A novel method for the manufacture ofMEMS devices with large exposed area based on SOl wafers

    Xie, J., Yuan, W. & Chang, H., 2009, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 253-256 4 p. 5068571. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    4 Scopus citations

  • Error autocompensation of micromachined gyroscopes

    Qin, Z., Yuan, W., Chang, H. & Xie, J., 2009, Micro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT. Trans Tech Publications, p. 274-277 4 p. (Advanced Materials Research; vol. 60-61).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Modeling of capacitive microaccelerometers with squeeze film damping and electrostatic effects using model order reduction

    Zhang, Y. F., Yuan, W. Z., Chang, H. L. & Xu, J. H., 2009, Micro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT. Trans Tech Publications, p. 213-218 6 p. (Advanced Materials Research; vol. 60-61).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Real-time and high-performance attitude and heading reference system based on MIMU/magnetometers

    Qin, W., Yuan, W., Chang, H., Xue, L. & Yuan, G., 2009, Micro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT. Trans Tech Publications, p. 219-223 5 p. (Advanced Materials Research; vol. 60-61).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    2 Scopus citations

  • Study of control system for a micro programmable blazed grating

    Yan, B., Yuan, W., Yu, Y., Wang, L., Qiao, D. & Li, T., 2009, Micro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT. Trans Tech Publications, p. 180-184 5 p. (Advanced Materials Research; vol. 60-61).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Two new micro programmable gratings and their potential applications

    Yu, Y., Yuan, W., Van, B., Li, T. & Wang, L., 2009, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. p. 946-949 4 p. 5068730. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • 2008

    Design and optimization of a micro piezoresistive pressure sensor

    Chen, S., Zhu, M. Q., Ma, B. H. & Yuan, W. Z., 2008, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. p. 351-356 6 p. 4484350. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    45 Scopus citations

  • Fabrication of a novel resonant pressure sensor based on SOI wafer

    Ma, Z., Ren, S., Qiao, D. & Yuan, W., 2008, 2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008. p. 593-596 4 p. (2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    4 Scopus citations

  • Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer

    Xu, J., Yuan, W., Chang, H., Lv, X. & Yu, Y., 2008, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. p. 357-361 5 p. 4484351. (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    5 Scopus citations

  • Prototyping of the computer integrated manufacturing processes of MEMS in a desktop micro-factory

    Wang, Y., Yuan, W. & Jiang, C., 2008, Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance. CSREA Press, p. 767-773 7 p. (Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • 2007

    A universal interface circuit for capacitive vibratory microgyroscopes

    Jiang, Q., Yuan, W. & Chang, H., 2007, Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007. p. 445-449 5 p. (Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007; vol. A).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Design of a new MEMS-based tunable grating with electrostatic comb drive

    Yu, Y., Yuan, W. & Xu, J., 2007, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems. 67241G. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6724).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    1 Scopus citations

  • On improving the accuracy of micromachined gyroscopes based on multi-sensor fusion

    Chang, H., Zhang, P., Hu, M. & Yuan, W., 2007, Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007. p. 213-217 5 p. (Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007; vol. A).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    4 Scopus citations

  • Opto-electro-mechanical mixed-signal system-level modeling of micro deformable mirror

    He, Y., Jiang, C., Yuan, W., Ma, B. & Huo, P., 2007, Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007. p. 33-40 8 p. (Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007; vol. A).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    1 Scopus citations

  • Sensing flow separation on a typical aerofoil by MEMS flexible thermal sensor array

    Liu, K., Yuan, W. Z., Deng, J. J., Bing-he, M. & Jiang, C. Y., 2007, Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007. p. 235-239 5 p. (Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007; vol. A).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    1 Scopus citations
  • 2006

    Comparative study on different types of segmented micro deformable mirrors

    Qiao, D., Yuan, W., Li, K., Li, X. & Rao, F., 2006, Proceedings of SPIE - The International Society for Optical Engineering. 61491H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6149).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    1 Scopus citations

  • Design of an electrostatic repulsive-force based vertical micro actuator

    Qiao, D. Y., Yuan, W. Z. & Li, X. Y., 2006, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. p. 168-171 4 p. 4134927. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    7 Scopus citations

  • Effects of residual stresses on mechanical properties of segmented micro deformable mirrors

    Yu, Y., Yuan, W. & Qiao, D., 2006, Proceedings of SPIE - The International Society for Optical Engineering. 614919. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6149).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    1 Scopus citations

  • MEMS R&D trends

    Jiang, C., He, Y. & Yuan, W., 2006, Advances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China. Jiang, C., Liu, G., Zhang, D. & Xu, X. (eds.). Trans Tech Publications Ltd, p. 181-184 4 p. (Materials Science Forum; vol. 532-533).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Numerical simulation of orthogonal cutting process of a kind of difficult-to-cut material

    Sheng, J. & Yuan, W., 2006, Advances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China. Jiang, C., Liu, G., Zhang, D. & Xu, X. (eds.). Trans Tech Publications Ltd, p. 925-928 4 p. (Materials Science Forum; vol. 532-533).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    2 Scopus citations

  • One mechanically decoupled Z-axis gyroscope

    Chang, H., Yuan, W., Xie, J., Jiang, Q. & Zhang, C., 2006, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. p. 373-376 4 p. 4134973. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    1 Scopus citations

  • On exploring application of MEMS in aerodynamic flow control

    Deng, J. J., Yuan, W. Z., Ma, B. H., Liu, K. & Wang, Y., 2006, Proceedings of MNT for Aerospace Applications, CANEUS2006. (Proceedings of MNT for Aerospace Applications, CANEUS2006; vol. 2006).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    2 Scopus citations

  • The modeling of Radioisotope Micro Batteries for microsystems

    Sun, L., Yuan, W. Z. & Qiao, D. Y., 2006, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. p. 178-181 4 p. 4134929. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • 2005

    Towards a framework for automatic service composition in manufacturing grid

    Zhang, L., Yuan, W. & Wang, W., 2005, Grid and Cooperative Computing - GCC 2005 - 4th International Conference, Proceedings. Springer Verlag, p. 238-243 6 p. (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); vol. 3795 LNCS).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    13 Scopus citations
  • 2004

    Multidisciplinary design and optimization of integrated microsystems

    Chang, H., Li, W., Yuan, W. & Ma, B., 2004, Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation. p. 277-282 6 p. (Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Residual stress induced deformation of bilayer plate with patterned additional layer

    Qiao, D. Y., Yuan, W. Z. & Li, W. J., 2004, Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation. p. 288-292 5 p. (Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    1 Scopus citations