An integrated reduced micromachined inertial measurement unit for land vehicle navigation

Honglong Chang, Qianyan Fu, Qiang Shen, Jianbing Xie, Weizheng Yuan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, a reduced micromachined inertial measurement unit (MIMU) was fabricated by a two-step selective SOI release process in order to meet the requirements of land vehicle navigation. In the process, the release process consists of two steps, i.e. dry release using notching effect and wet release using HF solution. Most area of the device was released in the dry etching process, but the boundaries of the proof mass and the suspension beams were not released until the wet etching. Through such a process configuration, the poor surface roughness on the bottom side of some important structures such as suspension beams was alleviated. While, the poor roughness on the bottom side of proof mass can alleviate the stiction effectively. The test results showed that the scale factors of the X/Y-axis accelerometer and Z-axis gyroscope were about 19.11 mV/g and 15.6mV/°/s at one atmosphere, respectively. The bias stability of the gyroscope was about 123.0deg/h with a resolution of 0.0151°/s/√Hz.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages201-204
Number of pages4
DOIs
StatePublished - 2011
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan, Province of China
Duration: 20 Feb 201123 Feb 2011

Publication series

NameNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period20/02/1123/02/11

Keywords

  • land vehicle navigation
  • notching effect
  • reduced MIMU
  • selective SOI release process

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