TY - GEN
T1 - An integrated reduced micromachined inertial measurement unit for land vehicle navigation
AU - Chang, Honglong
AU - Fu, Qianyan
AU - Shen, Qiang
AU - Xie, Jianbing
AU - Yuan, Weizheng
PY - 2011
Y1 - 2011
N2 - In this paper, a reduced micromachined inertial measurement unit (MIMU) was fabricated by a two-step selective SOI release process in order to meet the requirements of land vehicle navigation. In the process, the release process consists of two steps, i.e. dry release using notching effect and wet release using HF solution. Most area of the device was released in the dry etching process, but the boundaries of the proof mass and the suspension beams were not released until the wet etching. Through such a process configuration, the poor surface roughness on the bottom side of some important structures such as suspension beams was alleviated. While, the poor roughness on the bottom side of proof mass can alleviate the stiction effectively. The test results showed that the scale factors of the X/Y-axis accelerometer and Z-axis gyroscope were about 19.11 mV/g and 15.6mV/°/s at one atmosphere, respectively. The bias stability of the gyroscope was about 123.0deg/h with a resolution of 0.0151°/s/√Hz.
AB - In this paper, a reduced micromachined inertial measurement unit (MIMU) was fabricated by a two-step selective SOI release process in order to meet the requirements of land vehicle navigation. In the process, the release process consists of two steps, i.e. dry release using notching effect and wet release using HF solution. Most area of the device was released in the dry etching process, but the boundaries of the proof mass and the suspension beams were not released until the wet etching. Through such a process configuration, the poor surface roughness on the bottom side of some important structures such as suspension beams was alleviated. While, the poor roughness on the bottom side of proof mass can alleviate the stiction effectively. The test results showed that the scale factors of the X/Y-axis accelerometer and Z-axis gyroscope were about 19.11 mV/g and 15.6mV/°/s at one atmosphere, respectively. The bias stability of the gyroscope was about 123.0deg/h with a resolution of 0.0151°/s/√Hz.
KW - land vehicle navigation
KW - notching effect
KW - reduced MIMU
KW - selective SOI release process
UR - http://www.scopus.com/inward/record.url?scp=80053317428&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2011.6017329
DO - 10.1109/NEMS.2011.6017329
M3 - 会议稿件
AN - SCOPUS:80053317428
SN - 9781612847757
T3 - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
SP - 201
EP - 204
BT - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
T2 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Y2 - 20 February 2011 through 23 February 2011
ER -