Angularly parameterized macromodel extraction for microstructures with a large number of terminals

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Abstract

In this paper, we report a novel method for extracting the angular parameterized macromodels of the microstructures with a large number of input terminals. First, the macromodels are extracted by combining the block Arnoldi approach with the superposition theory of linear systems. Then, the angular parameterization for the macromodels is achieved by applying the equivalent matrix coordinate transformation. A pitch-tunable micro programmable grating is used to demonstrate the proposed macromodeling method. Numerical simulation results show that the macromodels can dramatically reduce the computation cost while capturing the device behavior faithfully. Compared with the FEM results, the relative error is less than 1.1%, and the efficiency for transient analysis improves about 45 times.

Original languageEnglish
Title of host publication4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages37-40
Number of pages4
DOIs
StatePublished - 2009
Event4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
Duration: 5 Jan 20098 Jan 2009

Publication series

Name4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Conference

Conference4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Country/TerritoryChina
CityShenzhen
Period5/01/098/01/09

Keywords

  • Angular parameterization
  • Block arnoldi algorithem
  • Macromodel
  • Reduced order model
  • Superposition theory

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