Modeling of capacitive microaccelerometers with squeeze film damping and electrostatic effects using model order reduction

Ya Fei Zhang, Wei Zheng Yuan, Hong Long Chang, Jing Hui Xu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Model order reduction is an effective method to generate macromodels for system-level simulation. But it is difficult to deal with the electro-mechanical-damping coupling problems. So we presents a new approach to model the capacitive microaccelerometers with squeeze film damping and electrostatic effects using model order reduction (MOR) method. In this approach, the mechanical, squeeze film damping and electrostatic domains of the devices are modeled separately and then coupled at system-level. The macromodel for squeezed film damping effects could account for slip condition of the flow at low pressure and edge effects. In addition, some important parameters are preserved as symbol. The extracted macromodels are translated into the hardware description language and imported into a circuit simulator. An accelerometer is used to demonstrate the feasibility and efficiency of the proposed approach. Numerical simulation results show that the extracted macromodel can dramatically reduce the computation cost while capturing the device behavior accurately.

Original languageEnglish
Title of host publicationMicro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT
PublisherTrans Tech Publications
Pages213-218
Number of pages6
ISBN (Print)0878493395, 9780878493395
DOIs
StatePublished - 2009
EventMicro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT - Beijing, China
Duration: 19 Nov 200822 Nov 2008

Publication series

NameAdvanced Materials Research
Volume60-61
ISSN (Print)1022-6680

Conference

ConferenceMicro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT
Country/TerritoryChina
CityBeijing
Period19/11/0822/11/08

Keywords

  • Arnoldi process
  • Electrostatic effect
  • Krylov subspace
  • Macromodel
  • MEMS
  • Squeeze film damping effect

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