@inproceedings{76ea1943b3f6456e9e5c1f980d9868e1,
title = "Design of an electrostatic repulsive-force based vertical micro actuator",
abstract = "Micro actuators using electrostatic repulsive-force induced by asymmetric electric field have no the problem of pull-in instability existing in electrostatic attractive-force based micro actuators, and their stroke is not limited by the initial gap between electrodes. In this paper, an improved structure of micro actuator based on electrostatic repulsive-force is presented to achieve a large vertical stroke without penalties of large actuation voltage and additional insulation layer. Numerical simulations are performed to investigate the relationship between the repulsive-force and the structural parameters. Simulation results show that the repulsive-force is highly dependent on finger width, finger distance and finger thickness rather than initial gap between movable and fixed fingers. Numerical simulation predicts that the repulsive-force based vertical micro actuator can achieve a stroke of 4 μm at a driving voltage of 78 V.",
keywords = "Actuator, Electrostatic, Micro, Repuslive",
author = "Qiao, {Da Y.} and Yuan, {Wei Z.} and Li, {Xiao Y.}",
year = "2006",
doi = "10.1109/NEMS.2006.334662",
language = "英语",
isbn = "1424401402",
series = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
pages = "168--171",
booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",
}