A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42°/h Bias Instability Within ±300°/s Full Scale

Hao Wang, Haiyang Quan, Jinqiu Zhou, Long Zhang, Jianbing Xie, Honglong Chang

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

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