A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42°/h Bias Instability Within ±300°/s Full Scale

Hao Wang, Haiyang Quan, Jinqiu Zhou, Long Zhang, Jianbing Xie, Honglong Chang

科研成果: 期刊稿件 › 文章 › 同行评审

17 引用 （Scopus）

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Engineering