A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42°/h Bias Instability Within ±300°/s Full Scale

Hao Wang; Haiyang Quan; Jinqiu Zhou; Long Zhang; Jianbing Xie; Honglong Chang

doi:10.1109/TIE.2021.3078375

A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42°/h Bias Instability Within ±300°/s Full Scale

Hao Wang, Haiyang Quan, Jinqiu Zhou, Long Zhang, Jianbing Xie, Honglong Chang

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

This article reports a MEMS disk resonator gyroscope (DRG) with superior overall performance in terms of bias instability, measurement range, and size. Specifically, a fully filled electrodes MEMS DRG is proposed to improve sensing capacitance to 23.66 pF and drive capacitance to 6.14 pF. The DRG is fabricated using a wafer-level vacuum-package process and is controlled and sensed by a configurable ASIC, enabling a small footprint. The DRG achieves an angle random walk of 0.05°/√h and bias instability of 0.42°/h within a full scale of ±300°/s, making it a very promising solution for angular measurement in high-end industrial applications.

Original language	English
Pages (from-to)	5304-5313
Number of pages	10
Journal	IEEE Transactions on Industrial Electronics
Volume	69
Issue number	5
DOIs	https://doi.org/10.1109/TIE.2021.3078375
State	Published - 1 May 2022

Keywords

Bias instability
disk resonator gyroscope (DRG)
wafer-level vacuum package (WLVP)

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10.1109/TIE.2021.3078375

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title = "A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42°/h Bias Instability Within ±300°/s Full Scale",

abstract = "This article reports a MEMS disk resonator gyroscope (DRG) with superior overall performance in terms of bias instability, measurement range, and size. Specifically, a fully filled electrodes MEMS DRG is proposed to improve sensing capacitance to 23.66 pF and drive capacitance to 6.14 pF. The DRG is fabricated using a wafer-level vacuum-package process and is controlled and sensed by a configurable ASIC, enabling a small footprint. The DRG achieves an angle random walk of 0.05°/√h and bias instability of 0.42°/h within a full scale of ±300°/s, making it a very promising solution for angular measurement in high-end industrial applications.",

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AU - Xie, Jianbing

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A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42°/h Bias Instability Within ±300°/s Full Scale

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Keywords

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