摘要
Ti-Si-N nano films were deposited on 1Crl8Ni9Ti stainless steel by reactive magnetic sputtering. The silicon contents in the films were varied in a range of 0-19.4at%. The results show that crystallite size decreases with the increase of silicon content, and the microhardness of Ti-Si-N film increase with an certain addition of silicon, the maximum hardness value of films is 43.5 GPa with 9.6at% silicon content in Ti-Si-N film. The bonding strength of Ti-Si-N is improved compared to TiN film. Furthermore, friction coefficient and wear rate of the Ti-Si-N films decrease firstly and then increase with addition of silicon. It shows a much lower friction coefficient at elevated temperature conditions, however the wear rate increase remarkably.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 1882-1885 |
| 页数 | 4 |
| 期刊 | Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering |
| 卷 | 34 |
| 期 | 12 |
| 出版状态 | 已出版 - 12月 2005 |
| 已对外发布 | 是 |