Thermodynamics investigation of the gas-phase reactions in the chemical vapor deposition of silicon borides with BCl3-SiCl4-H2 precursors

Haitao Ren, Litong Zhang, Kehe Su, Qingfeng Zeng, Laifei Cheng, Kang Guan, Hui Li

科研成果: 期刊稿件 › 文章 › 同行评审

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Chemistry

Chemical Engineering