Thermodynamics investigation of the gas-phase reactions in the chemical vapor deposition of silicon borides with BCl3-SiCl4-H2 precursors

Haitao Ren, Litong Zhang, Kehe Su, Qingfeng Zeng, Laifei Cheng, Kang Guan, Hui Li

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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Chemistry

Chemical Engineering