Thermodynamic analysis on deposition of [Formula presented] ceramic by low pressure chemical vapor deposition/infiltration from SiCH3Cl3[Formula presented]3[Formula presented]3[Formula presented]2[Formula presented] system

Ning Dong, Nan Chai, Yongsheng Liu, Xiaofei Liu, Hailong Qin, Xiaowei Yin, Litong Zhang, Laifei Cheng

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Chemical Engineering

Engineering