Thermodynamic analysis on deposition of [Formula presented] ceramic by low pressure chemical vapor deposition/infiltration from SiCH3Cl3[Formula presented]3[Formula presented]3[Formula presented]2[Formula presented] system

Ning Dong, Nan Chai, Yongsheng Liu, Xiaofei Liu, Hailong Qin, Xiaowei Yin, Litong Zhang, Laifei Cheng

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Fingerprint

Dive into the research topics of 'Thermodynamic analysis on deposition of [Formula presented] ceramic by low pressure chemical vapor deposition/infiltration from SiCH3Cl3[Formula presented]3[Formula presented]3[Formula presented]2[Formula presented] system'. Together they form a unique fingerprint.

Chemical Engineering

Engineering