Process optimization of DLC films by unbalanced magnetron sputtering for laser-induced damage threshold improvement

Junqi Xu, Junhong Su, Weiguo Liu, Huiqing Fan, Songlin Xie

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

4 引用 （Scopus）

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Material Science

Physics

Engineering