Process optimization of DLC films by unbalanced magnetron sputtering for laser-induced damage threshold improvement

Junqi Xu, Junhong Su, Weiguo Liu, Huiqing Fan, Songlin Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Process optimization of DLC films by unbalanced magnetron sputtering for laser-induced damage threshold improvement'. Together they form a unique fingerprint.

Material Science

Physics

Engineering