TY - GEN
T1 - Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer
AU - Xu, Jinghui
AU - Yuan, Weizheng
AU - Chang, Honglong
AU - Lv, Xianglian
AU - Yu, Yiting
PY - 2008
Y1 - 2008
N2 - A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then macromodels for the substructures with regular geometry were generated by analytical method and the ones with odd geometry by numerical method. After that, the created macromodels were interconnected according to the original topology of the MEMS device for system-level simulation. The method combines the advantages of both the analytical and numerical methods. Therefore, not only the parameterized design for some key components can be performed, but also the innovative design for some odd substructures can be realized. In the paper, we took the design of a z-axis micro accelerometer as an example to demonstrate the feasibility and efficiency of the proposed method.
AB - A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then macromodels for the substructures with regular geometry were generated by analytical method and the ones with odd geometry by numerical method. After that, the created macromodels were interconnected according to the original topology of the MEMS device for system-level simulation. The method combines the advantages of both the analytical and numerical methods. Therefore, not only the parameterized design for some key components can be performed, but also the innovative design for some odd substructures can be realized. In the paper, we took the design of a z-axis micro accelerometer as an example to demonstrate the feasibility and efficiency of the proposed method.
KW - Krylov subspace technique
KW - Macromodels
KW - Moment-matching
KW - Reduced-order models
KW - Transfer function
UR - http://www.scopus.com/inward/record.url?scp=50249176093&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2008.4484351
DO - 10.1109/NEMS.2008.4484351
M3 - 会议稿件
AN - SCOPUS:50249176093
SN - 9781424419081
T3 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
SP - 357
EP - 361
BT - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
T2 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Y2 - 6 January 2008 through 9 January 2008
ER -