Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer

Jinghui Xu; Weizheng Yuan; Honglong Chang; Xianglian Lv; Yiting Yu

doi:10.1109/NEMS.2008.4484351

Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer

Jinghui Xu, Weizheng Yuan, Honglong Chang, Xianglian Lv, Yiting Yu

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Scopus citations

Abstract

A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then macromodels for the substructures with regular geometry were generated by analytical method and the ones with odd geometry by numerical method. After that, the created macromodels were interconnected according to the original topology of the MEMS device for system-level simulation. The method combines the advantages of both the analytical and numerical methods. Therefore, not only the parameterized design for some key components can be performed, but also the innovative design for some odd substructures can be realized. In the paper, we took the design of a z-axis micro accelerometer as an example to demonstrate the feasibility and efficiency of the proposed method.

Original language	English
Title of host publication	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Pages	357-361
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2008.4484351
State	Published - 2008
Event	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China Duration: 6 Jan 2008 → 9 Jan 2008

Publication series

Name	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Conference

Conference	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Country/Territory	China
City	Sanya
Period	6/01/08 → 9/01/08

Keywords

Krylov subspace technique
Macromodels
Moment-matching
Reduced-order models
Transfer function

Access to Document

10.1109/NEMS.2008.4484351

Cite this

Xu, J., Yuan, W., Chang, H., Lv, X., & Yu, Y. (2008). Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer. In 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 (pp. 357-361). Article 4484351 (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS). https://doi.org/10.1109/NEMS.2008.4484351

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title = "Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer",

abstract = "A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then macromodels for the substructures with regular geometry were generated by analytical method and the ones with odd geometry by numerical method. After that, the created macromodels were interconnected according to the original topology of the MEMS device for system-level simulation. The method combines the advantages of both the analytical and numerical methods. Therefore, not only the parameterized design for some key components can be performed, but also the innovative design for some odd substructures can be realized. In the paper, we took the design of a z-axis micro accelerometer as an example to demonstrate the feasibility and efficiency of the proposed method.",

keywords = "Krylov subspace technique, Macromodels, Moment-matching, Reduced-order models, Transfer function",

author = "Jinghui Xu and Weizheng Yuan and Honglong Chang and Xianglian Lv and Yiting Yu",

year = "2008",

doi = "10.1109/NEMS.2008.4484351",

language = "英语",

isbn = "9781424419081",

series = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS",

pages = "357--361",

booktitle = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008",

note = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 ; Conference date: 06-01-2008 Through 09-01-2008",

}

Xu, J, Yuan, W , Chang, H, Lv, X & Yu, Y 2008, Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer. in 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008., 4484351, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, pp. 357-361, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China, 6/01/08. https://doi.org/10.1109/NEMS.2008.4484351

Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer. / Xu, Jinghui; Yuan, Weizheng ; Chang, Honglong et al.
3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. p. 357-361 4484351 (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer

AU - Xu, Jinghui

AU - Yuan, Weizheng

AU - Chang, Honglong

AU - Lv, Xianglian

AU - Yu, Yiting

PY - 2008

Y1 - 2008

N2 - A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then macromodels for the substructures with regular geometry were generated by analytical method and the ones with odd geometry by numerical method. After that, the created macromodels were interconnected according to the original topology of the MEMS device for system-level simulation. The method combines the advantages of both the analytical and numerical methods. Therefore, not only the parameterized design for some key components can be performed, but also the innovative design for some odd substructures can be realized. In the paper, we took the design of a z-axis micro accelerometer as an example to demonstrate the feasibility and efficiency of the proposed method.

AB - A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then macromodels for the substructures with regular geometry were generated by analytical method and the ones with odd geometry by numerical method. After that, the created macromodels were interconnected according to the original topology of the MEMS device for system-level simulation. The method combines the advantages of both the analytical and numerical methods. Therefore, not only the parameterized design for some key components can be performed, but also the innovative design for some odd substructures can be realized. In the paper, we took the design of a z-axis micro accelerometer as an example to demonstrate the feasibility and efficiency of the proposed method.

KW - Krylov subspace technique

KW - Macromodels

KW - Moment-matching

KW - Reduced-order models

KW - Transfer function

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BT - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008

T2 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008

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ER -

Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer

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Keywords

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