Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets

K. Tao, G. Ding, P. Wang, Z. Yang, Y. Wang

科研成果: 书/报告/会议事项章节会议稿件同行评审

30 引用 (Scopus)

摘要

This paper presents the fabrication and characterization of a novel fully integrated micro electromagnetic vibration energy harvester using micro-patterning of bonded magnets. The magnetic material utilized is a polymer composite, consisting of a commercially available NdFeB powder dispersed in epoxy resin to a weight loading percentage of 90%. The prototype is fabricated using UV-LIGA technology and microelectroplating technology. The whole volume of the structure is about 20 mm 3. Testing results show that the fabricated vibration energy harvesters can generate a maximum peak-peak voltage of 20.9 μV at the device's resonance frequency of 365 Hz and input acceleration of 1 g (9.8 m/s 2).

源语言英语
主期刊名2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
1237-1240
页数4
DOI
出版状态已出版 - 2012
已对外发布
活动2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, 法国
期限: 29 1月 20122 2月 2012

出版系列

姓名Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

会议

会议2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
国家/地区法国
Paris
时期29/01/122/02/12

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