Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets

K. Tao, G. Ding, P. Wang, Z. Yang, Y. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

30 Scopus citations

Abstract

This paper presents the fabrication and characterization of a novel fully integrated micro electromagnetic vibration energy harvester using micro-patterning of bonded magnets. The magnetic material utilized is a polymer composite, consisting of a commercially available NdFeB powder dispersed in epoxy resin to a weight loading percentage of 90%. The prototype is fabricated using UV-LIGA technology and microelectroplating technology. The whole volume of the structure is about 20 mm 3. Testing results show that the fabricated vibration energy harvesters can generate a maximum peak-peak voltage of 20.9 μV at the device's resonance frequency of 365 Hz and input acceleration of 1 g (9.8 m/s 2).

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages1237-1240
Number of pages4
DOIs
StatePublished - 2012
Externally publishedYes
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 29 Jan 20122 Feb 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/TerritoryFrance
CityParis
Period29/01/122/02/12

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