Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators

Geer Teng, Chenhao Yang, Aojie Quan, Chengxin Li, Haojie Li, Yuxuan Cheng, Honglong Chang, Michael Kraft, Hemin Zhang

科研成果: 期刊稿件 › 文章 › 同行评审

4 引用 （Scopus）

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Engineering

Physics