Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators

Geer Teng, Chenhao Yang, Aojie Quan, Chengxin Li, Haojie Li, Yuxuan Cheng, Honglong Chang, Michael Kraft, Hemin Zhang

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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Engineering

Physics