Epitaxial growth and electrical characterization of PBZT thin films by RF magnetron sputtering deposition

Barium modified lead zirconate titanate (PBZT) thin films were grown epitaxially on Pt/Ti/SiO₂/Si substrates by radio-frequency magnetron sputtering deposition and characterized by X-ray diffraction and scanning electron microscopy. Depending on the growth condition, a wide variation of crystal structure and morphology was evolved in PBZT thin films. The formation of phase structure and pyrochlore phase was strongly dependent on the oxygen partial pressure and re-evaporation of lead from the films during the deposition. Perovskite films were obtained by optimizing the deposition conditions and analyzed by the ferroelectric hysteresis (P∼E).