Effect of N 2-gas flow rates on the structures and properties of copper nitride films prepared by reactive DC magnetron sputtering

Xing'Ao Li, Qiufei Bai, Jianping Yang, Yongtao Li, Lixia Wang, Haiyun Wang, Shanling Ren, Shengli Liu, Wei Huang

科研成果: 期刊稿件文章同行评审

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Material Science