Effect of N 2-gas flow rates on the structures and properties of copper nitride films prepared by reactive DC magnetron sputtering

Xing'Ao Li, Qiufei Bai, Jianping Yang, Yongtao Li, Lixia Wang, Haiyun Wang, Shanling Ren, Shengli Liu, Wei Huang

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

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