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西北工业大学 国内
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Design of a new MEMS-based tunable grating with electrostatic comb drive
Yiting Yu
,
Weizheng Yuan
, Jinghui Xu
机电学院
Northwestern Polytechnical University Xian
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Engineering
Microelectromechanical System
100%
Voltage Driving
50%
Finite Element Modeling
25%
Finite Element Simulation
25%
Micro Machining
25%
Driving Force
25%
Grating Period
25%
Modal Analysis
25%
Static Analysis
25%
Connecting Beam
25%
Electrostatic Driving
25%
Physics
Electrostatics
100%
Microelectromechanical System
100%
Finite Element Analysis
25%
Finite Element Modeling
25%
Modal Analysis
25%
Micromachining
25%
Material Science
Microelectromechanical System
100%
Finite Element Method
25%
Finite Element Modeling
25%
Micromachining
25%
Analytical Method
25%
Modal Analysis
25%