@inproceedings{977db578809749d7b3fc14d32d6ee83c,
title = "Design of a new MEMS-based tunable grating with electrostatic comb drive",
abstract = "A new MEMS-based tunable grating with programmable grating period, driven by electrostatic comb, was designed. Finite element model was developed and finite element simulation was performed with ANSYS. Modal analysis and static analysis were carried out. To improve the calculation efficiency, electrostatic driving force at each movable comb was directly computed by analytical method instead of time-consuming coupled-field analysis. The results show that this MEMS-based tunable grating functions quite well when a driving voltage is provided. To operate at its working resonating mode much easier, thicker grating structure is needed, revealing the necessity in using the bulk micromachining such as SOI technology to fabricate the grating. Also, larger the length of connecting beam and spring beam, and smaller the width of spring beam, larger the deflection we can get for a specific driving voltage. The designed MEMS-based tunable grating can be applied in many fields.",
keywords = "Electrostatic comb drive, Finite element model, MEMS, Tunable grating",
author = "Yiting Yu and Weizheng Yuan and Jinghui Xu",
year = "2007",
doi = "10.1117/12.782857",
language = "英语",
isbn = "9780819468819",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies",
note = "3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems ; Conference date: 08-07-2007 Through 12-07-2007",
}