Ambient pressure drift rejection of mode-localized resonant sensors

Hemin Zhang; Jiming Zhong; Weizheng Yuan; Jing Yang; Honglong Chang

doi:10.1109/MEMSYS.2017.7863604

Ambient pressure drift rejection of mode-localized resonant sensors

Hemin Zhang, Jiming Zhong, Weizheng Yuan, Jing Yang, Honglong Chang

机电学院

Northwestern Polytechnical University Xian

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

55 引用（Scopus）

摘要

This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a mode-localized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is ∼2.74% whereas that of the frequency readout is ∼21.63% with a pressure range of [2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely ∼1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.

源语言	英语
主期刊名	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
出版商	Institute of Electrical and Electronics Engineers Inc.
页	1095-1098
页数	4
ISBN（电子版）	9781509050789
DOI	https://doi.org/10.1109/MEMSYS.2017.7863604
出版状态	已出版 - 23 2月 2017
活动	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, 美国期限: 22 1月 2017 → 26 1月 2017

出版系列

姓名	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
卷	0
ISSN（印刷版）	1084-6999

会议

会议	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
国家/地区	美国
市	Las Vegas
时期	22/01/17 → 26/01/17

访问文件

10.1109/MEMSYS.2017.7863604

其它文件与链接

链接到 Scopus 的出版物

引用此

Zhang, H., Zhong, J., Yuan, W., Yang, J., & Chang, H. (2017). Ambient pressure drift rejection of mode-localized resonant sensors. 在 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (页码 1095-1098). 文章 7863604 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 0). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863604

Zhang, Hemin ; Zhong, Jiming ; Yuan, Weizheng 等. / Ambient pressure drift rejection of mode-localized resonant sensors. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 页码 1095-1098 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{a3322be9b2384228919814b113dcbf77,

title = "Ambient pressure drift rejection of mode-localized resonant sensors",

abstract = "This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a mode-localized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is ∼2.74% whereas that of the frequency readout is ∼21.63% with a pressure range of [2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely ∼1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.",

author = "Hemin Zhang and Jiming Zhong and Weizheng Yuan and Jing Yang and Honglong Chang",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

year = "2017",

month = feb,

day = "23",

doi = "10.1109/MEMSYS.2017.7863604",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1095--1098",

booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",

}

Zhang, H, Zhong, J, Yuan, W, Yang, J & Chang, H 2017, Ambient pressure drift rejection of mode-localized resonant sensors. 在 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863604, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 卷 0, Institute of Electrical and Electronics Engineers Inc., 页码 1095-1098, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, 美国, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863604

Ambient pressure drift rejection of mode-localized resonant sensors. / Zhang, Hemin; Zhong, Jiming; Yuan, Weizheng 等.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 页码 1095-1098 7863604 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 0).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Ambient pressure drift rejection of mode-localized resonant sensors

AU - Zhang, Hemin

AU - Zhong, Jiming

AU - Yuan, Weizheng

AU - Yang, Jing

AU - Chang, Honglong

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a mode-localized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is ∼2.74% whereas that of the frequency readout is ∼21.63% with a pressure range of [2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely ∼1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.

AB - This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a mode-localized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is ∼2.74% whereas that of the frequency readout is ∼21.63% with a pressure range of [2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely ∼1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.

UR - http://www.scopus.com/inward/record.url?scp=85015747586&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2017.7863604

DO - 10.1109/MEMSYS.2017.7863604

M3 - 会议稿件

AN - SCOPUS:85015747586

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1095

EP - 1098

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

Zhang H, Zhong J, Yuan W, Yang J, Chang H. Ambient pressure drift rejection of mode-localized resonant sensors. 在 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. 页码 1095-1098. 7863604. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863604

Ambient pressure drift rejection of mode-localized resonant sensors

摘要

出版系列

会议

访问文件

其它文件与链接

指纹

引用此