Ambient pressure drift rejection of mode-localized resonant sensors

Hemin Zhang; Jiming Zhong; Weizheng Yuan; Jing Yang; Honglong Chang

doi:10.1109/MEMSYS.2017.7863604

Ambient pressure drift rejection of mode-localized resonant sensors

Hemin Zhang, Jiming Zhong, Weizheng Yuan, Jing Yang, Honglong Chang

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

54 Scopus citations

Abstract

This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a mode-localized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is ∼2.74% whereas that of the frequency readout is ∼21.63% with a pressure range of [2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely ∼1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1095-1098
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863604
State	Published - 23 Feb 2017
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 22 Jan 2017 → 26 Jan 2017

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	0
ISSN (Print)	1084-6999

Conference

Conference	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	22/01/17 → 26/01/17

Access to Document

10.1109/MEMSYS.2017.7863604

Cite this

Zhang, H., Zhong, J., Yuan, W., Yang, J., & Chang, H. (2017). Ambient pressure drift rejection of mode-localized resonant sensors. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 1095-1098). Article 7863604 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 0). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863604

Zhang, Hemin ; Zhong, Jiming ; Yuan, Weizheng et al. / Ambient pressure drift rejection of mode-localized resonant sensors. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1095-1098 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Ambient pressure drift rejection of mode-localized resonant sensors",

abstract = "This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a mode-localized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is ∼2.74% whereas that of the frequency readout is ∼21.63% with a pressure range of [2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely ∼1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.",

author = "Hemin Zhang and Jiming Zhong and Weizheng Yuan and Jing Yang and Honglong Chang",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

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Zhang, H, Zhong, J, Yuan, W, Yang, J & Chang, H 2017, Ambient pressure drift rejection of mode-localized resonant sensors. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863604, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 0, Institute of Electrical and Electronics Engineers Inc., pp. 1095-1098, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863604

Ambient pressure drift rejection of mode-localized resonant sensors. / Zhang, Hemin; Zhong, Jiming; Yuan, Weizheng et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1095-1098 7863604 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 0).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Yang, Jing

AU - Chang, Honglong

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a mode-localized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is ∼2.74% whereas that of the frequency readout is ∼21.63% with a pressure range of [2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely ∼1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.

AB - This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a mode-localized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is ∼2.74% whereas that of the frequency readout is ∼21.63% with a pressure range of [2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely ∼1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.

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PB - Institute of Electrical and Electronics Engineers Inc.

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Zhang H, Zhong J, Yuan W, Yang J, Chang H. Ambient pressure drift rejection of mode-localized resonant sensors. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1095-1098. 7863604. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863604

Ambient pressure drift rejection of mode-localized resonant sensors

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