A study of directional MEMS dual-fences gauge

Chengyu Ma, Binghe Ma, Jinjun Deng, Xinhang Jin

微电子学院

Northwestern Polytechnical University Xian

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

2 引用（Scopus）

Material Science

Physics

Mathematics

Engineering