A diaphragm secondary stress utilization method for increasing the sensitivity of piezoresistive pressure sensors without sacrificing linearity

Yuanying Zhang, Fengyun Liu, Xiaojing Wang, Xiubing Liang, Zheng Guo, Xiaoliang Luo, Jinjun Deng, Xingxu Zhang, Jian Luo, Binghe Ma

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Engineering

Material Science