A diaphragm secondary stress utilization method for increasing the sensitivity of piezoresistive pressure sensors without sacrificing linearity

Yuanying Zhang, Fengyun Liu, Xiaojing Wang, Xiubing Liang, Zheng Guo, Xiaoliang Luo, Jinjun Deng, Xingxu Zhang, Jian Luo, Binghe Ma

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'A diaphragm secondary stress utilization method for increasing the sensitivity of piezoresistive pressure sensors without sacrificing linearity'. Together they form a unique fingerprint.

Engineering

Material Science