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Thermodynamic study on co-deposition of ZrB 2-SiC from ZrCl 4-BCl 3-CH 3SiCl 3-H 2-Ar system
Juanli Deng, Laifei Cheng, Guopeng Zheng, Kehe Su, Litong Zhang
Research output: Contribution to journal › Article › peer-review