Thermodynamic study on co-deposition of ZrB 2-SiC from ZrCl 4-BCl 3-CH 3SiCl 3-H 2-Ar system

Juanli Deng; Laifei Cheng; Guopeng Zheng; Kehe Su; Litong Zhang

doi:10.1016/j.tsf.2012.07.105

Thermodynamic study on co-deposition of ZrB ₂-SiC from ZrCl ₄-BCl ₃-CH ₃SiCl ₃-H ₂-Ar system

Juanli Deng, Laifei Cheng, Guopeng Zheng, Kehe Su, Litong Zhang

School of Materials Sience and Engineering

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

Thermodynamics phase diagram of ZrB ₂-SiC co-deposited from precursors of ZrCl ₄-BCl ₃-CH ₃SiCl ₃ (methyltrichlorosilane, MTS)-H ₂-Ar has been investigated in detail by using the FactSage code and its embedded database (130 species being involved). The yields of condensed phases in the co-deposition process have been examined as the functions of the inject reactant ratios of BCl ₃ / (BCl ₃ + MTS) and H ₂ / (ZrCl ₄ + BCl ₃ + MTS), and the temperature at a fixed pressure of 5 kPa. The results show that their yields strongly depend on the molar ratios of the inject reactants and the temperature. Consequently, the pure ZrB ₂-SiC composite without free C, B ₄C, ZrC and ZrSi can be co-deposited under the ideal condition by adjusting the reactant ratios and the temperature. The gas-phase equilibrium concentration distribution shows that the high input amount of H ₂ is favorable for the co-deposition of ZrB ₂ and SiC at a fixed ratio of ZrCl ₄:BCl ₃:MTS:Ar. In the end, the theoretical results can lay down guidelines for increasing the experimental yields of ZrB ₂ and SiC.

Original language	English
Pages (from-to)	7030-7034
Number of pages	5
Journal	Thin Solid Films
Volume	520
Issue number	23
DOIs	https://doi.org/10.1016/j.tsf.2012.07.105
State	Published - 30 Sep 2012

Keywords

Chemical vapor deposition
Codeposition
Condensed phases
Silicon carbide
Thermodynamics
Zirconium boride

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title = "Thermodynamic study on co-deposition of ZrB 2-SiC from ZrCl 4-BCl 3-CH 3SiCl 3-H 2-Ar system",

abstract = "Thermodynamics phase diagram of ZrB 2-SiC co-deposited from precursors of ZrCl 4-BCl 3-CH 3SiCl 3 (methyltrichlorosilane, MTS)-H 2-Ar has been investigated in detail by using the FactSage code and its embedded database (130 species being involved). The yields of condensed phases in the co-deposition process have been examined as the functions of the inject reactant ratios of BCl 3 / (BCl 3 + MTS) and H 2 / (ZrCl 4 + BCl 3 + MTS), and the temperature at a fixed pressure of 5 kPa. The results show that their yields strongly depend on the molar ratios of the inject reactants and the temperature. Consequently, the pure ZrB 2-SiC composite without free C, B 4C, ZrC and ZrSi can be co-deposited under the ideal condition by adjusting the reactant ratios and the temperature. The gas-phase equilibrium concentration distribution shows that the high input amount of H 2 is favorable for the co-deposition of ZrB 2 and SiC at a fixed ratio of ZrCl 4:BCl 3:MTS:Ar. In the end, the theoretical results can lay down guidelines for increasing the experimental yields of ZrB 2 and SiC.",

keywords = "Chemical vapor deposition, Codeposition, Condensed phases, Silicon carbide, Thermodynamics, Zirconium boride",

author = "Juanli Deng and Laifei Cheng and Guopeng Zheng and Kehe Su and Litong Zhang",

year = "2012",

month = sep,

day = "30",

doi = "10.1016/j.tsf.2012.07.105",

language = "英语",

volume = "520",

pages = "7030--7034",

journal = "Thin Solid Films",

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T1 - Thermodynamic study on co-deposition of ZrB 2-SiC from ZrCl 4-BCl 3-CH 3SiCl 3-H 2-Ar system

AU - Deng, Juanli

AU - Cheng, Laifei

AU - Zheng, Guopeng

AU - Su, Kehe

AU - Zhang, Litong

PY - 2012/9/30

Y1 - 2012/9/30

N2 - Thermodynamics phase diagram of ZrB 2-SiC co-deposited from precursors of ZrCl 4-BCl 3-CH 3SiCl 3 (methyltrichlorosilane, MTS)-H 2-Ar has been investigated in detail by using the FactSage code and its embedded database (130 species being involved). The yields of condensed phases in the co-deposition process have been examined as the functions of the inject reactant ratios of BCl 3 / (BCl 3 + MTS) and H 2 / (ZrCl 4 + BCl 3 + MTS), and the temperature at a fixed pressure of 5 kPa. The results show that their yields strongly depend on the molar ratios of the inject reactants and the temperature. Consequently, the pure ZrB 2-SiC composite without free C, B 4C, ZrC and ZrSi can be co-deposited under the ideal condition by adjusting the reactant ratios and the temperature. The gas-phase equilibrium concentration distribution shows that the high input amount of H 2 is favorable for the co-deposition of ZrB 2 and SiC at a fixed ratio of ZrCl 4:BCl 3:MTS:Ar. In the end, the theoretical results can lay down guidelines for increasing the experimental yields of ZrB 2 and SiC.

AB - Thermodynamics phase diagram of ZrB 2-SiC co-deposited from precursors of ZrCl 4-BCl 3-CH 3SiCl 3 (methyltrichlorosilane, MTS)-H 2-Ar has been investigated in detail by using the FactSage code and its embedded database (130 species being involved). The yields of condensed phases in the co-deposition process have been examined as the functions of the inject reactant ratios of BCl 3 / (BCl 3 + MTS) and H 2 / (ZrCl 4 + BCl 3 + MTS), and the temperature at a fixed pressure of 5 kPa. The results show that their yields strongly depend on the molar ratios of the inject reactants and the temperature. Consequently, the pure ZrB 2-SiC composite without free C, B 4C, ZrC and ZrSi can be co-deposited under the ideal condition by adjusting the reactant ratios and the temperature. The gas-phase equilibrium concentration distribution shows that the high input amount of H 2 is favorable for the co-deposition of ZrB 2 and SiC at a fixed ratio of ZrCl 4:BCl 3:MTS:Ar. In the end, the theoretical results can lay down guidelines for increasing the experimental yields of ZrB 2 and SiC.

KW - Chemical vapor deposition

KW - Codeposition

KW - Condensed phases

KW - Silicon carbide

KW - Thermodynamics

KW - Zirconium boride

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Thermodynamic study on co-deposition of ZrB ₂-SiC from ZrCl ₄-BCl ₃-CH ₃SiCl ₃-H ₂-Ar system

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