The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators∗

Jianbing Xie; Sen Ren; Qiang Shen; Lei Chen; Hui Xie; Weizheng Yuan

doi:10.1109/INEC.2018.8441927

The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators^∗

Jianbing Xie, Sen Ren, Qiang Shen, Lei Chen, Hui Xie, Weizheng Yuan

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents the fabrication of High Height-to-Diameter Ratio Micro-Wineglass Resonators using glassblowing with thermal decomposition process. CaCO₃ is used as the thermal decomposition material in this process in this paper. A number of chips with deep cavities are fabricated and loaded with different doses of CaCO₃. The experiment results show that, the deep cavity can blowing a glass spherical shell with the H/DR of 0.79, which is better than the deep cavity glassblowing process without thermal decomposition.

Original language	English
Title of host publication	2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	45-46
Number of pages	2
ISBN (Print)	9781538642504
DOIs	https://doi.org/10.1109/INEC.2018.8441927
State	Published - 20 Aug 2018
Event	8th IEEE International Nanoelectronics Conferences, INEC 2018 - Kuala Lumpur, Malaysia Duration: 3 Jan 2018 → 5 Jan 2018

Publication series

Name	2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018

Conference

Conference	8th IEEE International Nanoelectronics Conferences, INEC 2018
Country/Territory	Malaysia
City	Kuala Lumpur
Period	3/01/18 → 5/01/18

Keywords

Glassblowing
Height-to-Diameter Ratio
Hemispherical Resonator Gyroscopes
Micro-Wineglass Resonators
Thermal Decomposition

Access to Document

10.1109/INEC.2018.8441927

Cite this

Xie, J., Ren, S., Shen, Q., Chen, L., Xie, H., & Yuan, W. (2018). The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators^∗ In 2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018 (pp. 45-46). Article 8441927 (2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INEC.2018.8441927

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title = "The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators∗ ",

abstract = "This paper presents the fabrication of High Height-to-Diameter Ratio Micro-Wineglass Resonators using glassblowing with thermal decomposition process. CaCO3 is used as the thermal decomposition material in this process in this paper. A number of chips with deep cavities are fabricated and loaded with different doses of CaCO3. The experiment results show that, the deep cavity can blowing a glass spherical shell with the H/DR of 0.79, which is better than the deep cavity glassblowing process without thermal decomposition.",

keywords = "Glassblowing, Height-to-Diameter Ratio, Hemispherical Resonator Gyroscopes, Micro-Wineglass Resonators, Thermal Decomposition",

author = "Jianbing Xie and Sen Ren and Qiang Shen and Lei Chen and Hui Xie and Weizheng Yuan",

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Xie, J, Ren, S, Shen, Q, Chen, L, Xie, H & Yuan, W 2018, The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators^∗ in 2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018., 8441927, 2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018, Institute of Electrical and Electronics Engineers Inc., pp. 45-46, 8th IEEE International Nanoelectronics Conferences, INEC 2018, Kuala Lumpur, Malaysia, 3/01/18. https://doi.org/10.1109/INEC.2018.8441927

The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators^∗ . / Xie, Jianbing; Ren, Sen; Shen, Qiang et al.
2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 45-46 8441927 (2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This paper presents the fabrication of High Height-to-Diameter Ratio Micro-Wineglass Resonators using glassblowing with thermal decomposition process. CaCO3 is used as the thermal decomposition material in this process in this paper. A number of chips with deep cavities are fabricated and loaded with different doses of CaCO3. The experiment results show that, the deep cavity can blowing a glass spherical shell with the H/DR of 0.79, which is better than the deep cavity glassblowing process without thermal decomposition.

AB - This paper presents the fabrication of High Height-to-Diameter Ratio Micro-Wineglass Resonators using glassblowing with thermal decomposition process. CaCO3 is used as the thermal decomposition material in this process in this paper. A number of chips with deep cavities are fabricated and loaded with different doses of CaCO3. The experiment results show that, the deep cavity can blowing a glass spherical shell with the H/DR of 0.79, which is better than the deep cavity glassblowing process without thermal decomposition.

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Xie J, Ren S, Shen Q, Chen L, Xie H, Yuan W. The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators^∗ In 2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 45-46. 8441927. (2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018). doi: 10.1109/INEC.2018.8441927