Numerical simulation of chemical vapor deposition process of SiC coating on special-shaped components

Guo Dong Sun; He Jun Li; Qian Gang Fu; Hui Li

doi:10.7673/j.issn.1006-2793.2017.02.018

Numerical simulation of chemical vapor deposition process of SiC coating on special-shaped components

Guo Dong Sun, He Jun Li, Qian Gang Fu, Hui Li

School of Materials Sience and Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

An integrated mathematical model depicting chemical vapor deposition(CVD)process of SiC coating on special-shaped components was developed. The model was proposed to simulate deposition behavior of SiC coating on typical special-shaped components. The calculated results indicate that the components with a slope have significant influence on the CVD process of SiC coating. Small angle between the slope and horizontal plant is beneficial to the quality control of CVD SiC. In terms of the components with step shape, it is suggested that the step part of a component should be placed along the downstream direction. The calculation results lay foundation on further research and optimization of CVD process of SiC coating.

Original language	English
Pages (from-to)	232-238
Number of pages	7
Journal	Guti Huojian Jishu/Journal of Solid Rocket Technology
Volume	40
Issue number	2
DOIs	https://doi.org/10.7673/j.issn.1006-2793.2017.02.018
State	Published - 1 Apr 2017

Keywords

Chemical vapor deposition
Numerical simulation
SiC coating
Special-shaped components

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10.7673/j.issn.1006-2793.2017.02.018

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title = "Numerical simulation of chemical vapor deposition process of SiC coating on special-shaped components",

abstract = "An integrated mathematical model depicting chemical vapor deposition(CVD)process of SiC coating on special-shaped components was developed. The model was proposed to simulate deposition behavior of SiC coating on typical special-shaped components. The calculated results indicate that the components with a slope have significant influence on the CVD process of SiC coating. Small angle between the slope and horizontal plant is beneficial to the quality control of CVD SiC. In terms of the components with step shape, it is suggested that the step part of a component should be placed along the downstream direction. The calculation results lay foundation on further research and optimization of CVD process of SiC coating.",

keywords = "Chemical vapor deposition, Numerical simulation, SiC coating, Special-shaped components",

author = "Sun, {Guo Dong} and Li, {He Jun} and Fu, {Qian Gang} and Hui Li",

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T1 - Numerical simulation of chemical vapor deposition process of SiC coating on special-shaped components

AU - Sun, Guo Dong

AU - Li, He Jun

AU - Fu, Qian Gang

AU - Li, Hui

PY - 2017/4/1

Y1 - 2017/4/1

N2 - An integrated mathematical model depicting chemical vapor deposition(CVD)process of SiC coating on special-shaped components was developed. The model was proposed to simulate deposition behavior of SiC coating on typical special-shaped components. The calculated results indicate that the components with a slope have significant influence on the CVD process of SiC coating. Small angle between the slope and horizontal plant is beneficial to the quality control of CVD SiC. In terms of the components with step shape, it is suggested that the step part of a component should be placed along the downstream direction. The calculation results lay foundation on further research and optimization of CVD process of SiC coating.

AB - An integrated mathematical model depicting chemical vapor deposition(CVD)process of SiC coating on special-shaped components was developed. The model was proposed to simulate deposition behavior of SiC coating on typical special-shaped components. The calculated results indicate that the components with a slope have significant influence on the CVD process of SiC coating. Small angle between the slope and horizontal plant is beneficial to the quality control of CVD SiC. In terms of the components with step shape, it is suggested that the step part of a component should be placed along the downstream direction. The calculation results lay foundation on further research and optimization of CVD process of SiC coating.

KW - Chemical vapor deposition

KW - Numerical simulation

KW - SiC coating

KW - Special-shaped components

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JO - Guti Huojian Jishu/Journal of Solid Rocket Technology

JF - Guti Huojian Jishu/Journal of Solid Rocket Technology

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Numerical simulation of chemical vapor deposition process of SiC coating on special-shaped components

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