Effect of C/B ratio in reactants on low-pressure CVD boron-doped carbon deposited from a BCl3-C3H6-H2 mixture

Yongsheng Liu, Litong Zhang, Laifei Cheng, Wenbin Yang, Yongdong Xu, Qingfeng Zeng

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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