Two-dimensional microscanner for laser projection

Yaobo Liu, Weizheng Yuan, Dayong Qiao, Longfei Shi, Xiangnan Guo

科研成果: 期刊稿件文章同行评审

4 引用 (Scopus)

摘要

The design of a two-dimensional (2D) microscanner actuated electrostatically is presented, and a silicon-on-insulator (SOI) micromachining process is utilized to fabricate the sample. The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes, generating maximum twisting angles of ±10° and ±5.3° under two 10-V square waves, respectively. A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner, revealing an image resolution of 168×56 at 20 frames per second.

源语言英语
文章编号062301
期刊Chinese Optics Letters
11
6
DOI
出版状态已出版 - 6月 2013
已对外发布

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