Two-dimensional microscanner for laser projection

Yaobo Liu; Weizheng Yuan; Dayong Qiao; Longfei Shi; Xiangnan Guo

doi:10.3788/COL201311.062301

Two-dimensional microscanner for laser projection

Yaobo Liu, Weizheng Yuan, Dayong Qiao, Longfei Shi, Xiangnan Guo

Ministry of Education of the People's Republic of China

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The design of a two-dimensional (2D) microscanner actuated electrostatically is presented, and a silicon-on-insulator (SOI) micromachining process is utilized to fabricate the sample. The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes, generating maximum twisting angles of ±10° and ±5.3° under two 10-V square waves, respectively. A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner, revealing an image resolution of 168×56 at 20 frames per second.

Original language	English
Article number	062301
Journal	Chinese Optics Letters
Volume	11
Issue number	6
DOIs	https://doi.org/10.3788/COL201311.062301
State	Published - Jun 2013
Externally published	Yes

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abstract = "The design of a two-dimensional (2D) microscanner actuated electrostatically is presented, and a silicon-on-insulator (SOI) micromachining process is utilized to fabricate the sample. The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes, generating maximum twisting angles of ±10° and ±5.3° under two 10-V square waves, respectively. A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner, revealing an image resolution of 168×56 at 20 frames per second.",

author = "Yaobo Liu and Weizheng Yuan and Dayong Qiao and Longfei Shi and Xiangnan Guo",

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AU - Liu, Yaobo

AU - Yuan, Weizheng

AU - Qiao, Dayong

AU - Shi, Longfei

AU - Guo, Xiangnan

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AB - The design of a two-dimensional (2D) microscanner actuated electrostatically is presented, and a silicon-on-insulator (SOI) micromachining process is utilized to fabricate the sample. The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes, generating maximum twisting angles of ±10° and ±5.3° under two 10-V square waves, respectively. A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner, revealing an image resolution of 168×56 at 20 frames per second.

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M3 - 文章

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JO - Chinese Optics Letters

JF - Chinese Optics Letters

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Two-dimensional microscanner for laser projection

Abstract

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