Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

Hui Juan Liu; Ning Chen; Qing Hua Zhang; Bo Jiang

Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

Hui Juan Liu, Ning Chen, Qing Hua Zhang, Bo Jiang

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

源语言	英语
页（从-至）	308-310+314
期刊	Guangxue Jishu/Optical Technique
卷	33
期	2
出版状态	已出版 - 3月 2007
已对外发布	是

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title = "Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology",

abstract = "Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.",

keywords = "Anti-reflective, Silicon oil, Sol-gel, Tetraethyl orthosilicate",

author = "Liu, {Hui Juan} and Ning Chen and Zhang, {Qing Hua} and Bo Jiang",

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AU - Liu, Hui Juan

AU - Chen, Ning

AU - Zhang, Qing Hua

AU - Jiang, Bo

PY - 2007/3

Y1 - 2007/3

N2 - Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

AB - Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

KW - Anti-reflective

KW - Silicon oil

KW - Sol-gel

KW - Tetraethyl orthosilicate

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M3 - 文章

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Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

摘要

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