Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

Hui Juan Liu; Ning Chen; Qing Hua Zhang; Bo Jiang

Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

Hui Juan Liu, Ning Chen, Qing Hua Zhang, Bo Jiang

Research output: Contribution to journal › Article › peer-review

Abstract

Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

Original language	English
Pages (from-to)	308-310+314
Journal	Guangxue Jishu/Optical Technique
Volume	33
Issue number	2
State	Published - Mar 2007
Externally published	Yes

Keywords

Anti-reflective
Silicon oil
Sol-gel
Tetraethyl orthosilicate

Cite this

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title = "Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology",

abstract = "Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.",

keywords = "Anti-reflective, Silicon oil, Sol-gel, Tetraethyl orthosilicate",

author = "Liu, {Hui Juan} and Ning Chen and Zhang, {Qing Hua} and Bo Jiang",

year = "2007",

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T1 - Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

AU - Liu, Hui Juan

AU - Chen, Ning

AU - Zhang, Qing Hua

AU - Jiang, Bo

PY - 2007/3

Y1 - 2007/3

N2 - Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

AB - Monolayer high anti-reflective coatings are coated by sol-gel method with tetraethyl orthosilicate(TEOS) and silicon oil (MW≈500) as precursor and ammonia as catalyst. The performance is characterized by transmission electric microscopy (TEM), IR spectrum, ultraviolet-visible spectrophotometry, etc. The results show that the transmittance can be more than 99.5%, the surface is smooth, and hydrophobic performance is raised.

KW - Anti-reflective

KW - Silicon oil

KW - Sol-gel

KW - Tetraethyl orthosilicate

UR - http://www.scopus.com/inward/record.url?scp=34248199780&partnerID=8YFLogxK

M3 - 文章

AN - SCOPUS:34248199780

SN - 1002-1582

VL - 33

SP - 308-310+314

JO - Guangxue Jishu/Optical Technique

JF - Guangxue Jishu/Optical Technique

IS - 2

ER -

Study on organic/inorganic hybrid organosilicon antireflective coatings by sol-gel technology

Abstract

Keywords

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