@inproceedings{e6ca2b30858a40e18839c3ecb40a05c7,
title = "Sensitive temperature measurements based on Lorentzian and Fano resonance lineshapes of a silicon photonic crystal cavity",
abstract = "We report a high-performance photonic temperature sensor by exploiting a silicon photonic crystal (PC) cavity. Since the PC cavity's spectra are very sensitive to the refractive index change, we observe remarkable variations of its resonant wavelength and output power under varying temperature levels. In a PC cavity with Lorentzian resonance lineshape, the sensor exhibits a linear spectrum-sensitivity of 70 pm/ °C, and the power-variation presents a high sensitivity as 1.28 dB/°C. In addition, the Fano resonance lineshape generated by the PC cavity has also been employed to measure the temperature, which shows improved power sensitivity as 2.94 dB/ °C. The demonstrated PC cavity-based sensor offers great potentials for low-cost, high sensitivity homogeneous sensing in chip-integrated devices.",
keywords = "Integrated optics devices, Resonators, Sensors, Silicon",
author = "Chenyang Zhao and Liang Fang and Qinchen Yuan and Xuetao Gan and Jianlin Zhao",
note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; Holography, Diffractive Optics, and Applications VII ; Conference date: 12-10-2016 Through 14-10-2016",
year = "2017",
doi = "10.1117/12.2248521",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yunlong Sheng and Changhe Zhou and Chongxiu Yu",
booktitle = "Holography, Diffractive Optics, and Applications VII",
}