Sensitive temperature measurements based on Lorentzian and Fano resonance lineshapes of a silicon photonic crystal cavity

Chenyang Zhao, Liang Fang, Qinchen Yuan, Xuetao Gan, Jianlin Zhao

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

We report a high-performance photonic temperature sensor by exploiting a silicon photonic crystal (PC) cavity. Since the PC cavity's spectra are very sensitive to the refractive index change, we observe remarkable variations of its resonant wavelength and output power under varying temperature levels. In a PC cavity with Lorentzian resonance lineshape, the sensor exhibits a linear spectrum-sensitivity of 70 pm/ °C, and the power-variation presents a high sensitivity as 1.28 dB/°C. In addition, the Fano resonance lineshape generated by the PC cavity has also been employed to measure the temperature, which shows improved power sensitivity as 2.94 dB/ °C. The demonstrated PC cavity-based sensor offers great potentials for low-cost, high sensitivity homogeneous sensing in chip-integrated devices.

源语言英语
主期刊名Holography, Diffractive Optics, and Applications VII
编辑Yunlong Sheng, Changhe Zhou, Chongxiu Yu
出版商SPIE
ISBN(电子版)9781510604636
DOI
出版状态已出版 - 2017
活动Holography, Diffractive Optics, and Applications VII - Beijing, 中国
期限: 12 10月 201614 10月 2016

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
10022
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Holography, Diffractive Optics, and Applications VII
国家/地区中国
Beijing
时期12/10/1614/10/16

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