Sensitive temperature measurements based on Lorentzian and Fano resonance lineshapes of a silicon photonic crystal cavity

Chenyang Zhao, Liang Fang, Qinchen Yuan, Xuetao Gan, Jianlin Zhao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report a high-performance photonic temperature sensor by exploiting a silicon photonic crystal (PC) cavity. Since the PC cavity's spectra are very sensitive to the refractive index change, we observe remarkable variations of its resonant wavelength and output power under varying temperature levels. In a PC cavity with Lorentzian resonance lineshape, the sensor exhibits a linear spectrum-sensitivity of 70 pm/ °C, and the power-variation presents a high sensitivity as 1.28 dB/°C. In addition, the Fano resonance lineshape generated by the PC cavity has also been employed to measure the temperature, which shows improved power sensitivity as 2.94 dB/ °C. The demonstrated PC cavity-based sensor offers great potentials for low-cost, high sensitivity homogeneous sensing in chip-integrated devices.

Original languageEnglish
Title of host publicationHolography, Diffractive Optics, and Applications VII
EditorsYunlong Sheng, Changhe Zhou, Chongxiu Yu
PublisherSPIE
ISBN (Electronic)9781510604636
DOIs
StatePublished - 2017
EventHolography, Diffractive Optics, and Applications VII - Beijing, China
Duration: 12 Oct 201614 Oct 2016

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10022
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceHolography, Diffractive Optics, and Applications VII
Country/TerritoryChina
CityBeijing
Period12/10/1614/10/16

Keywords

  • Integrated optics devices
  • Resonators
  • Sensors
  • Silicon

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