On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme

Chengxin Li, Chen Wang, Aojie Quan, Linlin Wang, Michael Kraft, Hemin Zhang, Mustafa Mert Torunbalci

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

This work demonstrates tunable frequency sensitivity in a piezoresistive resonator through a DC thermal pump scheme. The piezoresistive resonator is a dual clamped-clamped beam, actuated capacitively and detected piezo-resistively (CAPD). By applying an additional DC thermal voltage, a thermal perturbation stiffness is introduced due to the intrinsic resistance difference between the piezoresistive beams. The stiffness alters the mechanical stiffness of the CAPD resonator, enhancing its frequency sensitivity. Experimental results show that the application of the DC thermal pumping voltage increases the frequency sensitivity by 1.8 times compared to its intrinsic frequency sensitivity.

源语言英语
主期刊名IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings
出版商Institute of Electrical and Electronics Engineers Inc.
ISBN(电子版)9798350371901
DOI
出版状态已出版 - 2024
活动2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Taipei, 中国台湾
期限: 22 9月 202426 9月 2024

出版系列

姓名IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings

会议

会议2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024
国家/地区中国台湾
Taipei
时期22/09/2426/09/24

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