On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme

Chengxin Li; Chen Wang; Aojie Quan; Linlin Wang; Michael Kraft; Hemin Zhang; Mustafa Mert Torunbalci

doi:10.1109/UFFC-JS60046.2024.10793995

On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme

Chengxin Li, Chen Wang, Aojie Quan, Linlin Wang, Michael Kraft, Hemin Zhang, Mustafa Mert Torunbalci

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This work demonstrates tunable frequency sensitivity in a piezoresistive resonator through a DC thermal pump scheme. The piezoresistive resonator is a dual clamped-clamped beam, actuated capacitively and detected piezo-resistively (CAPD). By applying an additional DC thermal voltage, a thermal perturbation stiffness is introduced due to the intrinsic resistance difference between the piezoresistive beams. The stiffness alters the mechanical stiffness of the CAPD resonator, enhancing its frequency sensitivity. Experimental results show that the application of the DC thermal pumping voltage increases the frequency sensitivity by 1.8 times compared to its intrinsic frequency sensitivity.

Original language	English
Title of host publication	IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9798350371901
DOIs	https://doi.org/10.1109/UFFC-JS60046.2024.10793995
State	Published - 2024
Event	2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Taipei, Taiwan, Province of China Duration: 22 Sep 2024 → 26 Sep 2024

Publication series

Name	IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings

Conference

Conference	2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024
Country/Territory	Taiwan, Province of China
City	Taipei
Period	22/09/24 → 26/09/24

Keywords

actuated capacitively
detected piezo-resistively
piezoresistive resonator
thermal pump
Tunable frequency sensitivity

Access to Document

10.1109/UFFC-JS60046.2024.10793995

Cite this

Li, C., Wang, C., Quan, A., Wang, L., Kraft, M., Zhang, H., & Torunbalci, M. M. (2024). On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme. In IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings (IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/UFFC-JS60046.2024.10793995

Li, Chengxin ; Wang, Chen ; Quan, Aojie et al. / On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme. IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2024. (IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings).

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title = "On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme",

abstract = "This work demonstrates tunable frequency sensitivity in a piezoresistive resonator through a DC thermal pump scheme. The piezoresistive resonator is a dual clamped-clamped beam, actuated capacitively and detected piezo-resistively (CAPD). By applying an additional DC thermal voltage, a thermal perturbation stiffness is introduced due to the intrinsic resistance difference between the piezoresistive beams. The stiffness alters the mechanical stiffness of the CAPD resonator, enhancing its frequency sensitivity. Experimental results show that the application of the DC thermal pumping voltage increases the frequency sensitivity by 1.8 times compared to its intrinsic frequency sensitivity.",

keywords = "actuated capacitively, detected piezo-resistively, piezoresistive resonator, thermal pump, Tunable frequency sensitivity",

author = "Chengxin Li and Chen Wang and Aojie Quan and Linlin Wang and Michael Kraft and Hemin Zhang and Torunbalci, {Mustafa Mert}",

note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 ; Conference date: 22-09-2024 Through 26-09-2024",

year = "2024",

doi = "10.1109/UFFC-JS60046.2024.10793995",

language = "英语",

series = "IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Li, C, Wang, C, Quan, A, Wang, L, Kraft, M, Zhang, H & Torunbalci, MM 2024, On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme. in IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings. IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024, Taipei, Taiwan, Province of China, 22/09/24. https://doi.org/10.1109/UFFC-JS60046.2024.10793995

On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme. / Li, Chengxin; Wang, Chen; Quan, Aojie et al.
IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2024. (IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme

AU - Li, Chengxin

AU - Wang, Chen

AU - Quan, Aojie

AU - Wang, Linlin

AU - Kraft, Michael

AU - Zhang, Hemin

AU - Torunbalci, Mustafa Mert

PY - 2024

Y1 - 2024

N2 - This work demonstrates tunable frequency sensitivity in a piezoresistive resonator through a DC thermal pump scheme. The piezoresistive resonator is a dual clamped-clamped beam, actuated capacitively and detected piezo-resistively (CAPD). By applying an additional DC thermal voltage, a thermal perturbation stiffness is introduced due to the intrinsic resistance difference between the piezoresistive beams. The stiffness alters the mechanical stiffness of the CAPD resonator, enhancing its frequency sensitivity. Experimental results show that the application of the DC thermal pumping voltage increases the frequency sensitivity by 1.8 times compared to its intrinsic frequency sensitivity.

AB - This work demonstrates tunable frequency sensitivity in a piezoresistive resonator through a DC thermal pump scheme. The piezoresistive resonator is a dual clamped-clamped beam, actuated capacitively and detected piezo-resistively (CAPD). By applying an additional DC thermal voltage, a thermal perturbation stiffness is introduced due to the intrinsic resistance difference between the piezoresistive beams. The stiffness alters the mechanical stiffness of the CAPD resonator, enhancing its frequency sensitivity. Experimental results show that the application of the DC thermal pumping voltage increases the frequency sensitivity by 1.8 times compared to its intrinsic frequency sensitivity.

KW - actuated capacitively

KW - detected piezo-resistively

KW - piezoresistive resonator

KW - thermal pump

KW - Tunable frequency sensitivity

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T3 - IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings

BT - IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024

Y2 - 22 September 2024 through 26 September 2024

ER -

Li C, Wang C, Quan A, Wang L, Kraft M, Zhang H et al. On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme. In IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2024. (IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings). doi: 10.1109/UFFC-JS60046.2024.10793995

On Tuning the Sensitivity of Thermal Piezoresistive Resonators by a DC Thermal Pumping Scheme

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