Micro-Sensors with Giant magnetoelectric Coefficient

Keli Zhao; Peng Pang; Zhonggang Zhang; Guangyao Pei; Yunzhe Liu; Tao Zhang; Xingxu Zhang; Jian Luo; Binghe Ma

Micro-Sensors with Giant magnetoelectric Coefficient

Keli Zhao, Peng Pang, Zhonggang Zhang, Guangyao Pei, Yunzhe Liu, Tao Zhang, Xingxu Zhang, Jian Luo, Binghe Ma

微电子学院

Northwestern Polytechnical University Xian

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor's limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.

源语言	英语
主期刊名	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
出版商	Institute of Electrical and Electronics Engineers Inc.
页	1668-1671
页数	4
ISBN（电子版）	9784886864352
出版状态	已出版 - 2023
活动	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, 日本期限: 25 6月 2023 → 29 6月 2023

出版系列

姓名	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

会议

会议	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
国家/地区	日本
市	Kyoto
时期	25/06/23 → 29/06/23

其它文件与链接

链接到 Scopus 的出版物

引用此

Zhao, K., Pang, P., Zhang, Z., Pei, G., Liu, Y., Zhang, T., Zhang, X., Luo, J., & Ma, B. (2023). Micro-Sensors with Giant magnetoelectric Coefficient. 在 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (页码 1668-1671). (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023). Institute of Electrical and Electronics Engineers Inc..

Zhao, Keli ; Pang, Peng ; Zhang, Zhonggang 等. / Micro-Sensors with Giant magnetoelectric Coefficient. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. 页码 1668-1671 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

@inproceedings{c417f4315cd94be88ff283204035247b,

title = "Micro-Sensors with Giant magnetoelectric Coefficient",

abstract = "This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor's limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.",

keywords = "Doped zinc oxide, Giant magnetoelectric coefficient, Laminated cantilever, MEMS, Weak magnetic sensors",

author = "Keli Zhao and Peng Pang and Zhonggang Zhang and Guangyao Pei and Yunzhe Liu and Tao Zhang and Xingxu Zhang and Jian Luo and Binghe Ma",

note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",

year = "2023",

language = "英语",

series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1668--1671",

booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

}

Zhao, K, Pang, P, Zhang, Z, Pei, G, Liu, Y, Zhang, T, Zhang, X, Luo, J & Ma, B 2023, Micro-Sensors with Giant magnetoelectric Coefficient. 在 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Institute of Electrical and Electronics Engineers Inc., 页码 1668-1671, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Kyoto, 日本, 25/06/23.

Micro-Sensors with Giant magnetoelectric Coefficient. / Zhao, Keli; Pang, Peng; Zhang, Zhonggang 等.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. 页码 1668-1671 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Micro-Sensors with Giant magnetoelectric Coefficient

AU - Zhao, Keli

AU - Pang, Peng

AU - Zhang, Zhonggang

AU - Pei, Guangyao

AU - Liu, Yunzhe

AU - Zhang, Tao

AU - Zhang, Xingxu

AU - Luo, Jian

AU - Ma, Binghe

PY - 2023

Y1 - 2023

N2 - This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor's limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.

AB - This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor's limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.

KW - Doped zinc oxide

KW - Giant magnetoelectric coefficient

KW - Laminated cantilever

KW - MEMS

KW - Weak magnetic sensors

UR - http://www.scopus.com/inward/record.url?scp=85193551109&partnerID=8YFLogxK

M3 - 会议稿件

AN - SCOPUS:85193551109

T3 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

SP - 1668

EP - 1671

BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Y2 - 25 June 2023 through 29 June 2023

ER -

Zhao K, Pang P, Zhang Z, Pei G, Liu Y, Zhang T 等. Micro-Sensors with Giant magnetoelectric Coefficient. 在 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc. 2023. 页码 1668-1671. (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Micro-Sensors with Giant magnetoelectric Coefficient

摘要

出版系列

会议

其它文件与链接

指纹

引用此