Micro-Sensors with Giant magnetoelectric Coefficient

Keli Zhao; Peng Pang; Zhonggang Zhang; Guangyao Pei; Yunzhe Liu; Tao Zhang; Xingxu Zhang; Jian Luo; Binghe Ma

Micro-Sensors with Giant magnetoelectric Coefficient

Keli Zhao, Peng Pang, Zhonggang Zhang, Guangyao Pei, Yunzhe Liu, Tao Zhang, Xingxu Zhang, Jian Luo, Binghe Ma

School of Microelectronics

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor's limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.

Original language	English
Title of host publication	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1668-1671
Number of pages	4
ISBN (Electronic)	9784886864352
State	Published - 2023
Event	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023

Publication series

Name	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/Territory	Japan
City	Kyoto
Period	25/06/23 → 29/06/23

Keywords

Doped zinc oxide
Giant magnetoelectric coefficient
Laminated cantilever
MEMS
Weak magnetic sensors

Cite this

Zhao, K., Pang, P., Zhang, Z., Pei, G., Liu, Y., Zhang, T., Zhang, X., Luo, J., & Ma, B. (2023). Micro-Sensors with Giant magnetoelectric Coefficient. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 1668-1671). (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023). Institute of Electrical and Electronics Engineers Inc..

Zhao, Keli ; Pang, Peng ; Zhang, Zhonggang et al. / Micro-Sensors with Giant magnetoelectric Coefficient. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 1668-1671 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

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title = "Micro-Sensors with Giant magnetoelectric Coefficient",

abstract = "This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor's limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.",

keywords = "Doped zinc oxide, Giant magnetoelectric coefficient, Laminated cantilever, MEMS, Weak magnetic sensors",

author = "Keli Zhao and Peng Pang and Zhonggang Zhang and Guangyao Pei and Yunzhe Liu and Tao Zhang and Xingxu Zhang and Jian Luo and Binghe Ma",

note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",

year = "2023",

language = "英语",

series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1668--1671",

booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

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Zhao, K, Pang, P, Zhang, Z, Pei, G, Liu, Y, Zhang, T, Zhang, X, Luo, J & Ma, B 2023, Micro-Sensors with Giant magnetoelectric Coefficient. in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Institute of Electrical and Electronics Engineers Inc., pp. 1668-1671, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Kyoto, Japan, 25/06/23.

Micro-Sensors with Giant magnetoelectric Coefficient. / Zhao, Keli; Pang, Peng; Zhang, Zhonggang et al.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 1668-1671 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Micro-Sensors with Giant magnetoelectric Coefficient

AU - Zhao, Keli

AU - Pang, Peng

AU - Zhang, Zhonggang

AU - Pei, Guangyao

AU - Liu, Yunzhe

AU - Zhang, Tao

AU - Zhang, Xingxu

AU - Luo, Jian

AU - Ma, Binghe

PY - 2023

Y1 - 2023

N2 - This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor's limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.

AB - This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor's limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.

KW - Doped zinc oxide

KW - Giant magnetoelectric coefficient

KW - Laminated cantilever

KW - MEMS

KW - Weak magnetic sensors

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M3 - 会议稿件

AN - SCOPUS:85193551109

T3 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

SP - 1668

EP - 1671

BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Y2 - 25 June 2023 through 29 June 2023

ER -

Zhao K, Pang P, Zhang Z, Pei G, Liu Y, Zhang T et al. Micro-Sensors with Giant magnetoelectric Coefficient. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 1668-1671. (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Micro-Sensors with Giant magnetoelectric Coefficient

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