Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

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3 引用（Scopus）

源语言	英语
文章编号	89201
期刊	Science China Information Sciences
卷	62
期	8
DOI	https://doi.org/10.1007/s11432-018-9593-1
出版状态	已出版 - 1 8月 2019

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title = "Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes",

author = "Zhao Xu and Changhua Hu and Jinwen Hu",

year = "2019",

month = aug,

day = "1",

doi = "10.1007/s11432-018-9593-1",

language = "英语",

volume = "62",

journal = "Science China Information Sciences",

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T1 - Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

AU - Xu, Zhao

AU - Hu, Changhua

AU - Hu, Jinwen

PY - 2019/8/1

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M3 - 快报

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SN - 1674-733X

VL - 62

JO - Science China Information Sciences

JF - Science China Information Sciences

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M1 - 89201

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