Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

Research output: Contribution to journal › Letter › peer-review

3 Scopus citations

Original language	English
Article number	89201
Journal	Science China Information Sciences
Volume	62
Issue number	8
DOIs	https://doi.org/10.1007/s11432-018-9593-1
State	Published - 1 Aug 2019

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title = "Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes",

author = "Zhao Xu and Changhua Hu and Jinwen Hu",

year = "2019",

month = aug,

day = "1",

doi = "10.1007/s11432-018-9593-1",

language = "英语",

volume = "62",

journal = "Science China Information Sciences",

issn = "1674-733X",

publisher = "Science China Press ",

number = "8",

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T1 - Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

AU - Xu, Zhao

AU - Hu, Changhua

AU - Hu, Jinwen

PY - 2019/8/1

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DO - 10.1007/s11432-018-9593-1

M3 - 快报

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SN - 1674-733X

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JO - Science China Information Sciences

JF - Science China Information Sciences

IS - 8

M1 - 89201

ER -