Improvement of MEMS gyroscope interface circuit in 0.5 μm CMOS technics

Fang Chen, Honglong Chang, Weizheng Yuan, Haitao Zhao

科研成果: 期刊稿件文章同行评审

摘要

A high precision CMOS interface readout circuit for a capacitive MEMS gyroscope is designed, the influences of the noise and mismatch to the capacitive readout circuit are analyzed theoretically in detail. Based on a continuous time voltage sensing topology, a low-noise charge sensitive amplifier with input and output common feedback circuit is designed, which the input and output common voltage is 2.5 V, and the input noise floor of the amplifier is 9 nV. the carrier wave modulation technique is used to eliminated the flicker noise, the designed interface circuit was simulated in Cadence and an experimental PCB circuit was made accordingly. The result shows that it can not only remove the impacts of most parasitic capacitances and restrain the noise & coupling signals, but also reduce the impacts of offset voltage that comes from mismatch on capacitive resolution, the simulation shows that its capacitance resolution is 0. 13 aF/ √Hz, can satisfied the requirements of navigation-grade and the requirements of navigation-grade.

源语言英语
页(从-至)1560-1564
页数5
期刊Chinese Journal of Sensors and Actuators
23
11
DOI
出版状态已出版 - 20 11月 2010

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