Improvement of MEMS gyroscope interface circuit in 0.5 μm CMOS technics

Fang Chen, Honglong Chang, Weizheng Yuan, Haitao Zhao

Research output: Contribution to journalArticlepeer-review

Abstract

A high precision CMOS interface readout circuit for a capacitive MEMS gyroscope is designed, the influences of the noise and mismatch to the capacitive readout circuit are analyzed theoretically in detail. Based on a continuous time voltage sensing topology, a low-noise charge sensitive amplifier with input and output common feedback circuit is designed, which the input and output common voltage is 2.5 V, and the input noise floor of the amplifier is 9 nV. the carrier wave modulation technique is used to eliminated the flicker noise, the designed interface circuit was simulated in Cadence and an experimental PCB circuit was made accordingly. The result shows that it can not only remove the impacts of most parasitic capacitances and restrain the noise & coupling signals, but also reduce the impacts of offset voltage that comes from mismatch on capacitive resolution, the simulation shows that its capacitance resolution is 0. 13 aF/ √Hz, can satisfied the requirements of navigation-grade and the requirements of navigation-grade.

Original languageEnglish
Pages (from-to)1560-1564
Number of pages5
JournalChinese Journal of Sensors and Actuators
Volume23
Issue number11
DOIs
StatePublished - 20 Nov 2010

Keywords

  • Capacitance resolution
  • CMOS
  • High precision
  • Mems gyroscope

Fingerprint

Dive into the research topics of 'Improvement of MEMS gyroscope interface circuit in 0.5 μm CMOS technics'. Together they form a unique fingerprint.

Cite this